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  1. Extreme ultraviolet lithography - Wikipedia

    It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates.

  2. Made-in-China EUV machine targets AI chip output by 2028

    6 days ago · Credit: ASML China has reportedly built an extreme‑ultraviolet (EUV) lithography machine inside a high‑security laboratory in Shenzhen, in what sources described as a …

  3. China Has Reportedly Built Its First EUV Machine Prototype

    Dec 17, 2025 · China's semiconductor industry might have taken a technological leaps, as a report claims that the nation has built the first EUV prototype.

  4. China Secretly Builds Its Own EUV Chipmaking Machine

    6 days ago · China is testing a secret EUV lithography prototype, a step toward chip self-reliance amid tightening export controls and surging AI demand.

  5. China successfully develops EUV machine prototype

    6 days ago · China has successfully engineered its first EUV lithography machine with the help of some former ASML employees, reports claim. It isn’t fully functional yet and will only be able to …

  6. China may have reverse engineered EUV lithography tool in covert …

    6 days ago · China has reportedly built and begun testing a secret EUV lithography prototype using ASML-style laser-produced plasma technology. Yet, despite generating 13.5-nm light, …

  7. China Completes EUV Prototype in 'Manhattan Project' Push

    6 days ago · China Completes EUV Prototype in Manhattan Project Push Prototype, part of Chinese Manhattan Project, faces precision and component challenges but marks step toward …

  8. China Has Built A Prototype EUV Lithography Machine

    Dec 18, 2025 · An exclusive report by Reuters, which was published on 18 December 2025, details a significant breakthrough in the global semiconductor race: China has successfully …

  9. China reportedly has a prototype EUV machine built by ex

    Dec 17, 2025 · China reportedly has a prototype EUV machine built by ex-ASML employees A Reuters exclusive suggests China is closer to semiconductor independence than previously …

  10. China built a secret prototype EUV lithography machine in ... - MSN

    China just pushed the semiconductor fight into a new chapter. Inside a sealed compound in Shenzhen, scientists built a prototype EUV lithography machine that Washington has tried to …